Granted Patent
Utility
US 6,228,779 · App. 09/187,247
Ultra thin oxynitride and nitride/oxide stacked gate dielectrics fabricated by high pressure technology
Inventors:
John A. Bloom, Dim-Lee Kwong, Robert K. Evans, Bruce T. Acker
Patented Case
View Patent ↗
Granted: May 8, 2001
Filed: Nov 6, 1998
Inventors
John A. Bloom
Dim-Lee Kwong
Robert K. Evans
Bruce T. Acker
Assignee (at issue)
Novellus Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.