Granted Patent
Utility
US 6,229,595 · App. 08/439,951
Lithography system and method with mask image enlargement
Inventors:
William G. McKinley, Gerard M. Perron, Berge Tatian
Patented Case
View Patent ↗
Granted: May 8, 2001
Filed: May 12, 1995
Inventors
William G. McKinley
Gerard M. Perron
Berge Tatian
Assignee (at issue)
B. F. Goodrich Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.