Granted Patent
Utility
US 6,229,639 · App. 09/112,631
Multiplexer for laser lithography
Inventors:
Robert G. Ozarski, Alexander I. Ershov
Patented Case
View Patent ↗
Granted: May 8, 2001
Filed: Jul 9, 1998
Inventors
Robert G. Ozarski
Alexander I. Ershov
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.