Granted Patent
Utility
US 6,229,871 · App. 09/357,613
Projection lithography with distortion compensation using reticle chuck contouring
Inventor:
Daniel A. Tichenor
Patented Case
View Patent ↗
Granted: May 8, 2001
Filed: Jul 20, 1999
Inventor
Daniel A. Tichenor
Assignee (at issue)
EUV LLC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.