Granted Patent
Utility
US 6,232,139 · App. 09/240,780
Method of making suspended thin-film semiconductor piezoelectric devices
Inventors:
Stephen A. Casalnuovo, Gregory C. Frye-Mason
Patented Case
View Patent ↗
Granted: May 15, 2001
Filed: Jan 29, 1999
Inventors
Stephen A. Casalnuovo
Gregory C. Frye-Mason
Assignee (at issue)
Sandia Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.