Granted Patent
Utility
US 6,233,056 · App. 09/627,533
Interferometric at-wavelength flare characterization of EUV optical systems
Inventors:
Patrick P. Naulleau, Kenneth Alan Goldberg
Patented Case
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Granted: May 15, 2001
Filed: Jul 28, 2000
Inventors
Patrick P. Naulleau
Kenneth Alan Goldberg
Assignee (at issue)
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
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