Granted Patent
Utility
US 6,234,738 · App. 09/288,513
Thin substrate transferring apparatus
Inventors:
Kazuo Kimata, Katsuhiko Kato
Patented Case
View Patent ↗
Granted: May 22, 2001
Filed: Apr 8, 1999
Inventors
Kazuo Kimata
Katsuhiko Kato
Assignee (at issue)
MECS, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.