Granted Patent
Utility
US 6,235,434 · App. 09/208,622
Method for mask repair using defect compensation
Inventors:
Donald W. Sweeney, Avijit K. Ray-Chaudhuri
Patented Case
View Patent ↗
Granted: May 22, 2001
Filed: Dec 8, 1998
Inventors
Donald W. Sweeney
Avijit K. Ray-Chaudhuri
Assignee (at issue)
EUV LLC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.