Granted Patent
Utility
US 6,235,620 · App. 09/382,329
Process for manufacturing semiconductor integrated circuit device
Inventors:
Masayoshi Saito, Makoto Yoshida, Hiroshi Kawakami, Tadashi Umezawa
Patented Case
View Patent ↗
Granted: May 22, 2001
Filed: Aug 24, 1999
Inventors
Masayoshi Saito
Makoto Yoshida
Hiroshi Kawakami
Tadashi Umezawa
Assignee (at issue)
HITACHI, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.