Granted Patent
Utility
US 6,235,632 · App. 09/006,495
Tungsten plug formation
Inventors:
Takeshi Nogami, Guarionex Morales, Minh Van Ngo
Patented Case
View Patent ↗
Granted: May 22, 2001
Filed: Jan 13, 1998
Inventors
Takeshi Nogami
Guarionex Morales
Minh Van Ngo
Assignee (at issue)
Advanced Micro Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.