Granted Patent
Utility
US 6,235,656 · App. 09/609,733
Dual degas/cool loadlock cluster tool
Inventor:
Andrew Clarke
Patented Case
View Patent ↗
Granted: May 22, 2001
Filed: Jul 3, 2000
Inventor
Andrew Clarke
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.