Granted Patent
Utility
US 6,236,044 · App. 09/138,230
Method and apparatus for inspection of a substrate by use of a ring illuminator
Inventors:
Mau-Song Chou, Richard A. Chodzko, L. Suzanne Casement, Jonathan W. Arenberg
Patented Case
View Patent ↗
Granted: May 22, 2001
Filed: Aug 21, 1998
Inventors
Mau-Song Chou
Richard A. Chodzko
L. Suzanne Casement
Jonathan W. Arenberg
Assignee (at issue)
TRW Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.