Granted Patent
Utility
US 6,236,491 · App. 09/320,891
Micromachined electrostatic actuator with air gap
Inventor:
Scott H. Goodwin-Johansson
Patented Case
View Patent ↗
Granted: May 22, 2001
Filed: May 27, 1999
Inventor
Scott H. Goodwin-Johansson
Assignee (at issue)
MCNC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.