Granted Patent
Utility
US 6,236,542 · App. 08/184,718
Substrate independent superpolishing process and slurry
Inventors:
Brent Ray Den Hartog, Dennis L. Fox, James A. Hagan, John C. S. Shen, Kannimangalam Venkatasubramanyam Viswanathan
Patented Case
View Patent ↗
Granted: May 22, 2001
Filed: Jan 21, 1994
Inventors
Brent Ray Den Hartog
Dennis L. Fox
James A. Hagan
John C. S. Shen
Kannimangalam Venkatasubramanyam Viswanathan
Assignee (at issue)
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.