Granted Patent
Utility
US 6,238,512 · App. 09/234,488
Plasma generation apparatus
Inventors:
Yunlong Li, Noriyoshi Sato, Satoru Iizuka
Patented Case
View Patent ↗
Granted: May 29, 2001
Filed: Jan 21, 1999
Inventors
Yunlong Li
Noriyoshi Sato
Satoru Iizuka
Assignees (at issue)
Hitachi Kokusai Electric Inc.
Noriyoshi Sato
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.