Granted Patent
Utility
US 6,238,515 · App. 09/376,996
Wafer transfer apparatus
Inventors:
Masaki Tsujimoto, Kenji Kobayashi, Hideo Numata, Keisuke Tokubuchi
Patented Case
View Patent ↗
Granted: May 29, 2001
Filed: Aug 18, 1999
Inventors
Masaki Tsujimoto
Kenji Kobayashi
Hideo Numata
Keisuke Tokubuchi
Assignees (at issue)
LINTEC CORPORATION
Kabushiki Kaisha Toshiba
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.