Granted Patent
Utility
US 6,238,734 · App. 09/350,074
Liquid precursor mixtures for deposition of multicomponent metal containing materials
Inventors:
Yoshihide Senzaki, David A. Roberts, John Anthony Thomas Norman
Patented Case
View Patent ↗
Granted: May 29, 2001
Filed: Jul 8, 1999
Inventors
Yoshihide Senzaki
David A. Roberts
John Anthony Thomas Norman
Assignee (at issue)
Air Products and Chemicals, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.