IP Library Granted Patent US 6,238,735
Granted Patent Utility
US 6,238,735 · App. 09/391,964

Method of uniformly coating a substrate

Inventors: Robert P. Mandal, James C. Grambow, Ted Dettes, Donald R. Sauer, Emir Gurer, Edmond R. Ward
Patented Case View Patent ↗
Granted: May 29, 2001 Filed: Sep 8, 1999
Inventors
Robert P. Mandal
James C. Grambow
Ted Dettes
Donald R. Sauer
Emir Gurer
Edmond R. Ward
Assignee (at issue)
Silicon Valley Group, Inc.

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Quick Facts
Patent No.
US 6,238,735
App. No.
09/391,964
Filed
1999-09-08
Granted
2001-05-29
Kind
A