IP Library Granted Patent US 6,238,825
Granted Patent Utility
US 6,238,825 · App. 09/442,839

Mask with alternating scattering bars

Inventor: Benjamin Szu-Min Lin
Patented Case View Patent ↗
Granted: May 29, 2001 Filed: Nov 18, 1999
Inventor
Benjamin Szu-Min Lin
Assignee (at issue)
UNITED MICROELECTORNICS CORP.

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Quick Facts
Patent No.
US 6,238,825
App. No.
09/442,839
Filed
1999-11-18
Granted
2001-05-29
Kind
A