IP Library Granted Patent US 6,238,849
Granted Patent Utility
US 6,238,849 · App. 09/481,063

Cyclic ureas in photoresist developers

Inventors: John Anthony Marsella, Kevin Rodney Lassila
Patented Case View Patent ↗
Granted: May 29, 2001 Filed: Jan 11, 2000
Inventors
John Anthony Marsella
Kevin Rodney Lassila
Assignee (at issue)
Air Products and Chemicals, Inc.

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Quick Facts
Patent No.
US 6,238,849
App. No.
09/481,063
Filed
2000-01-11
Granted
2001-05-29
Kind
A