Granted Patent
Utility
US 6,239,026 · App. 09/162,185
Nitride etch stop for poisoned unlanded vias
Inventors:
Qizhi Liu, David Feiler
Patented Case
View Patent ↗
Granted: May 29, 2001
Filed: Sep 28, 1998
Inventors
Qizhi Liu
David Feiler
Assignee (at issue)
Conexant Systems, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.