Granted Patent
Utility
US 6,239,031 · App. 09/487,493
Stepper alignment mark structure for maintaining alignment integrity
Inventors:
Nick Kepler, Olov Karlsson, Larry Wang, Basab Bandyopadhyah, Effiong Ibok, Christopher F. Lyons
Patented Case
View Patent ↗
Granted: May 29, 2001
Filed: Jan 19, 2000
Inventors
Nick Kepler
Olov Karlsson
Larry Wang
Basab Bandyopadhyah
Effiong Ibok
Christopher F. Lyons
Assignee (at issue)
Advanced Micro Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.