Granted Patent
Utility
US 6,239,041 · App. 09/380,646
Method for fabricating semiconductor integrated circuit device
Inventors:
Yoshikazu Tanabe, Satoshi Sakai, Nobuyoshi Natsuaki
Patented Case
View Patent ↗
Granted: May 29, 2001
Filed: Sep 7, 1999
Inventors
Yoshikazu Tanabe
Satoshi Sakai
Nobuyoshi Natsuaki
Assignee (at issue)
HITACHI, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.