Granted Patent
Utility
US 6,239,404 · App. 09/462,147
Plasma processing apparatus
Inventors:
Leslie Michael Lea, Edward Guibarra
Patented Case
View Patent ↗
Granted: May 29, 2001
Filed: Mar 8, 2000
Inventors
Leslie Michael Lea
Edward Guibarra
Assignee (at issue)
Surface Technology Systems Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.