IP Library Granted Patent US 6,239,863
Granted Patent Utility
US 6,239,863 · App. 09/473,710

Removable cover for protecting a reticle, system including and method of using the same

Inventors: Eric Brian Catey, David A. Hult, Santiago del Puerto, Stephen Roux
Patented Case View Patent ↗
Granted: May 29, 2001 Filed: Dec 29, 1999
Inventors
Eric Brian Catey
David A. Hult
Santiago del Puerto
Stephen Roux
Assignee (at issue)
Silicon Valley Group, Inc.

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Quick Facts
Patent No.
US 6,239,863
App. No.
09/473,710
Filed
1999-12-29
Granted
2001-05-29
Kind
A