Granted Patent
Utility
US 6,240,933 · App. 08/853,649
Methods for cleaning semiconductor surfaces
Inventor:
Eric J. Bergman
Patented Case
View Patent ↗
Granted: Jun 5, 2001
Filed: May 9, 1997
Inventor
Eric J. Bergman
Assignee (at issue)
Semitool, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.