Granted Patent
Utility
US 6,242,045 · App. 08/083,206
Process of preparing metal nitride films using a metal halide and an amine
Inventors:
James W. Proscia, Keith Brian Williams, Gene P. Reck
Patented Case
View Patent ↗
Granted: Jun 5, 2001
Filed: Jun 24, 1993
Inventors
James W. Proscia
Keith Brian Williams
Gene P. Reck
Assignee (at issue)
Visteon Global Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.