Granted Patent
Utility
US 6,242,739 · App. 09/294,247
Method and apparatus for non-destructive determination of film thickness and dopant concentration using fourier transform infrared spectrometry
Inventor:
Alexander Cherkassky
Patented Case
View Patent ↗
Granted: Jun 5, 2001
Filed: Apr 19, 1999
Inventor
Alexander Cherkassky
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.