Granted Patent
Utility
US 6,249,347 · App. 09/420,935
Method and system for high speed measuring of microscopic targets
Inventors:
Donald J. Svetkoff, Donald B. T. Kilgus, Warren Lin, Jonathan S. Ehrmann
Patented Case
View Patent ↗
Granted: Jun 19, 2001
Filed: Oct 19, 1999
Inventors
Donald J. Svetkoff
Donald B. T. Kilgus
Warren Lin
Jonathan S. Ehrmann
Assignee (at issue)
General Scanning, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.