Granted Patent
Utility
US 6,253,464 · App. 09/642,222
Method for protection of lithographic components from particle contamination
Inventors:
Leonard E. Klebanoff, Daniel J. Rader
Patented Case
View Patent ↗
Granted: Jul 3, 2001
Filed: Aug 18, 2000
Inventors
Leonard E. Klebanoff
Daniel J. Rader
Assignee (at issue)
EUV LLC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.