Granted Patent
Utility
US 6,253,783 · App. 09/695,361
Method for sub-atmospheric gas delivery with backflow control
Inventors:
Kurt A. Carlsen, James V. McManus, James Dietz
Patented Case
View Patent ↗
Granted: Jul 3, 2001
Filed: Oct 24, 2000
Inventors
Kurt A. Carlsen
James V. McManus
James Dietz
Assignees (at issue)
International Business Machines Corporation
ADVANCED TECHNOLOGY & MATERIALS CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.