Granted Patent
Utility
US 6,254,792 · App. 09/093,291
Isotropic dry cleaning process for noble metal integrated circuit structures
Inventors:
Peter C. Van Buskirk, Frank Dimeo, Jr., Peter C. Kirlin, Thomas H. Baum
Patented Case
View Patent ↗
Granted: Jul 3, 2001
Filed: Jun 8, 1998
Inventors
Peter C. Van Buskirk
Frank Dimeo, Jr.
Peter C. Kirlin
Thomas H. Baum
Assignee (at issue)
ADVANCED TECHNOLOGY & MATERIALS CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.