Granted Patent
Utility
US 6,255,148 · App. 09/327,572
Polycrystal thin film forming method and forming system
Inventors:
Akito Hara, Kuninori Kitahara
Patented Case
View Patent ↗
Granted: Jul 3, 2001
Filed: Jun 8, 1999
Inventors
Akito Hara
Kuninori Kitahara
Assignee (at issue)
Fujitsu Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.