Granted Patent
Utility
US 6,255,176 · App. 09/517,362
Method of forming trench for semiconductor device isolation
Inventors:
Seo-Won Kim, Yun-Woong Hyun
Patented Case
View Patent ↗
Granted: Jul 3, 2001
Filed: Mar 2, 2000
Inventors
Seo-Won Kim
Yun-Woong Hyun
Assignees (at issue)
Anam Semiconductor
Amkor Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.