Granted Patent
Utility
US 6,258,491 · App. 09/361,685
Mask for high resolution optical lithography
Inventor:
Juan R. Maldonado
Patented Case
View Patent ↗
Granted: Jul 10, 2001
Filed: Jul 27, 1999
Inventor
Juan R. Maldonado
Assignee (at issue)
ETEC SYSTEMS, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.