Granted Patent
Utility
US 6,258,721 · App. 09/472,104
Diamond slurry for chemical-mechanical planarization of semiconductor wafers
Inventors:
Yuzhuo Li, David Cerutti, Donald Joseph Buckley, Earl Royce Tyre, Jr., Jason Keleher, Richard J. Uriarte, Ferenc Horkay
Patented Case
View Patent ↗
Granted: Jul 10, 2001
Filed: Dec 27, 1999
Inventors
Yuzhuo Li
David Cerutti
Donald Joseph Buckley
Earl Royce Tyre, Jr.
Jason Keleher
Richard J. Uriarte
Ferenc Horkay
Assignee (at issue)
General Electric Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.