Granted Patent
Utility
US 6,258,723 · App. 09/271,720
Dry etching method and a TFT fabrication method
Inventors:
Masatomo Takeichi, Hiroaki Kitahara
Patented Case
View Patent ↗
Granted: Jul 10, 2001
Filed: Mar 18, 1999
Inventors
Masatomo Takeichi
Hiroaki Kitahara
Assignee (at issue)
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.