Granted Patent
Utility
US 6,258,733 · App. 09/620,751
Method and apparatus for misted liquid source deposition of thin film with reduced mist particle size
Inventors:
Narayan Solayappan, Robert W. Grant, Larry D. McMillan, Carlos A. Paz de Araujo
Patented Case
View Patent ↗
Granted: Jul 10, 2001
Filed: Jul 21, 2000
Inventors
Narayan Solayappan
Robert W. Grant
Larry D. McMillan
Carlos A. Paz de Araujo
Assignee (at issue)
Sand hill Capital II, LP
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.