Granted Patent
Utility
US 6,259,062 · App. 09/454,377
Process chamber cooling
Inventor:
Chenyu Pan
Patented Case
View Patent ↗
Granted: Jul 10, 2001
Filed: Dec 3, 1999
Inventor
Chenyu Pan
Assignee (at issue)
ASM America, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.