IP Library Granted Patent US 6,259,093
Granted Patent Utility
US 6,259,093 · App. 09/201,182

Surface analyzing apparatus

Inventors: Shigeru Wakiyama, Naohiko Fujino
Patented Case View Patent ↗
Granted: Jul 10, 2001 Filed: Nov 30, 1998
Inventors
Shigeru Wakiyama
Naohiko Fujino
Assignees (at issue)
SEIKO INSTRUMENTS INC.
MITSUBISHI ELECTRIC CORPORATION

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Quick Facts
Patent No.
US 6,259,093
App. No.
09/201,182
Filed
1998-11-30
Granted
2001-07-10
Kind
A