Granted Patent
Utility
US 6,259,209 · App. 08/938,995
Plasma processing apparatus with coils in dielectric windows
Inventors:
Jyoti Kiron Bhardwaj, Leslie Michael Lea
Patented Case
View Patent ↗
Granted: Jul 10, 2001
Filed: Sep 26, 1997
Inventors
Jyoti Kiron Bhardwaj
Leslie Michael Lea
Assignee (at issue)
Surface Technology Systems Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.