IP Library Granted Patent US 6,259,309
Granted Patent Utility
US 6,259,309 · App. 09/305,434

Method and apparatus for the replacement of non-operational metal lines in DRAMS

Inventors: Gerhard Mueller, Toshiaki Kirihata
Patented Case View Patent ↗
Granted: Jul 10, 2001 Filed: May 5, 1999
Inventors
Gerhard Mueller
Toshiaki Kirihata
Assignees (at issue)
International Business Machines Corporation
Siemens Microelectronics, Inc.
SMI CO., LTD.
Seimen Dram Semiconductor Corp.
Infineon Technologies AG

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Quick Facts
Patent No.
US 6,259,309
App. No.
09/305,434
Filed
1999-05-05
Granted
2001-07-10
Kind
A