Granted Patent
Utility
US 6,261,978 · App. 09/253,875
Process for forming semiconductor device with thick and thin films
Inventors:
Ping-Yang Chen, Navakanta Bhat, Paul G. Y. Tsui, Daniel T. Pham
Patented Case
View Patent ↗
Granted: Jul 17, 2001
Filed: Feb 22, 1999
Inventors
Ping-Yang Chen
Navakanta Bhat
Paul G. Y. Tsui
Daniel T. Pham
Assignee (at issue)
Motorola, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.