Granted Patent
Utility
US 6,262,845 · App. 09/300,809
Apparatus and method for generating partially coherent illumination for photolithography
Inventor:
William C. Sweatt
Patented Case
View Patent ↗
Granted: Jul 17, 2001
Filed: Apr 27, 1999
Inventor
William C. Sweatt
Assignee (at issue)
Sandia Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.