Granted Patent
Utility
US 6,264,550 · App. 09/559,410
Clean room and method of remodeling clean room
Inventor:
Yoshihiro Matsumoto
Patented Case
View Patent ↗
Granted: Jul 24, 2001
Filed: Apr 26, 2000
Inventor
Yoshihiro Matsumoto
Assignee (at issue)
Nippon Steel Semiconductor Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.