Granted Patent
Utility
US 6,264,789 · App. 09/562,218
System for dispensing polishing liquid during chemical mechanical polishing of a semiconductor wafer
Inventors:
Sumit Pandey, Fen F. Jamin
Patented Case
View Patent ↗
Granted: Jul 24, 2001
Filed: Apr 28, 2000
Inventors
Sumit Pandey
Fen F. Jamin
Assignees (at issue)
Infineon Technologies AG
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.