Granted Patent
Utility
US 6,265,288 · App. 09/390,085
Method of manufacturing silicon-based thin-film photoelectric conversion device
Inventors:
Yoshifumi Okamoto, Masashi Yoshimi
Patented Case
View Patent ↗
Granted: Jul 24, 2001
Filed: Sep 3, 1999
Inventors
Yoshifumi Okamoto
Masashi Yoshimi
Assignee (at issue)
KANEKA CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.