Granted Patent
Utility
US 6,265,779 · App. 09/132,608
Method and material for integration of fuorine-containing low-k dielectrics
Inventors:
Alfred Grill, Christopher V. Jahnes, Vishnubhai V. Patel, Katherine L. Saenger
Patented Case
View Patent ↗
Granted: Jul 24, 2001
Filed: Aug 11, 1998
Inventors
Alfred Grill
Christopher V. Jahnes
Vishnubhai V. Patel
Katherine L. Saenger
Assignee (at issue)
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.