Granted Patent
Utility
US 6,267,909 · App. 09/416,353
Planarization composition for removing metal films
Inventors:
James E. Currie, Michael Jones, Thomas J. Grebinski
Patented Case
View Patent ↗
Granted: Jul 31, 2001
Filed: Oct 12, 1999
Inventors
James E. Currie
Michael Jones
Thomas J. Grebinski
Assignee (at issue)
ADVANCED TECHNOLOGY & MATERIALS CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.