Granted Patent
Utility
US 6,268,608 · App. 09/169,566
Method and apparatus for selective in-situ etching of inter dielectric layers
Inventor:
Clive D. Chandler
Patented Case
View Patent ↗
Granted: Jul 31, 2001
Filed: Oct 9, 1998
Inventor
Clive D. Chandler
Assignee (at issue)
FEI Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.